DISPOSITIF ET PROCEDE POUR LE MAINTIEN D'UNE PRESSION QUASI–ATMOSPHERIQUE DANS UNE CHAMBRE DE TRAITEMENT
| N° de brevet: |
EP1899509 (A1) |
| Date de publication: |
2008-03-19 |
| Inventeur(s): |
VAN DE KERKHOF ANTONIUS M C P [NL]; |
| Demandeur(s): |
NXP BV [NL]; |
| Classification: |
C30B31/16;C30B33/00;H01L21/00; |
| N° de demande: |
EP20060765843 20060623 |
| Numéro(s) de priorité: |
WO2006IB52059 20060623;EP20050105814 20050629;EP20060765843 20060623 |
A lighting system operating using a digital mirror as its operative device. The digital mirror is used to shape the light which is passed through advanced optical devices to produce an output.
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