CIBLE DE PULVÉRISATION D'OXYDE DE GALLIUM ET D OXYDE DE ZINC, PROCÉDÉ DE FORMATION D UN FILM CONDUCTEUR TRANSPARENT, ET FILM CONDUCTEUR TRANSPARENT

N° de brevet: EP1897969 (A1)
Date de publication: 2008-03-12
Inventeur(s): OSADA KOZO [JP];
Demandeur(s): NIPPON MINING CO [JP];
Classification: C23C14/34;C04B35/453;H01B5/14;H01B13/00;
N° de demande: EP20060757010 20060606 
Numéro(s) de priorité: WO2006JP311270 20060606;JP20050187540 20050628;JP20050313051 20051027 
Provided is a high density gallium oxide-zinc oxide series sintered body sputtering target for forming a transparent conductive film containing 20 to 2000 mass ppm of zirconium oxide. In a gallium oxide (Ga 2 O 3 )-zinc oxide (ZnO) series sputtering target (GZO series target) for forming a transparent conductive film, trace amounts of specific elements are added to obtain a target capable of improving the conductivity and the bulk density of the target; in other words, capable of improving the component composition to increase the sintered density, inhibit the formation of nodules, and prevent the generation of an abnormal electrical discharge and particles. Also provided are a method for forming a transparent conductive film using such a target, and a transparent conductive film formed thereby.

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