CIBLE DE PULVÉRISATION D OXYDE DE GALLIUM–OXYDE DE ZINC, PROCÉDÉ DE FABRICATION D UNE PELLICULE TRANSPARENTE CONDUCTRICE ET PELLICULE TRANSPARENTE CONDUCTRICE

N° de brevet: EP1897968 (A1)
Date de publication: 2008-03-12
Inventeur(s): OSADA K [JP];
Demandeur(s): NIPPON MINING CO [JP];
Classification: C23C14/34;C04B35/453;G02B1/10;G02F1/1343;H01B5/14;H01B13/00;
N° de demande: EP20060756730 20060530 
Numéro(s) de priorité: WO2006JP310734 20060530;JP20050187554 20050628;JP20050313219 20051027 
Provided is a high density gallium oxide-zinc oxide series sintered body sputtering target for forming a transparent conductive film containing 20 to 500 mass ppm of aluminum oxide. In a gallium oxide (Ga 2 O 3 )-zinc oxide (ZnO) series sputtering target (GZO series target) for forming a transparent conductive film, trace amounts of specific elements are added to obtain a target capable of improving the conductivity and the bulk density of the target; in other words, capable of improving the component composition to increase the sintered density, inhibit the formation of nodules, and prevent the generation of an abnormal electrical discharge and particles. Also provided are a method for forming a transparent conductive film using such a target, and a transparent conductive film formed thereby.

Copyright © 2008 Patfr.com Tous droits réservés. Contact