PROCEDE DE FORMATION D'UN FILM DIELECTRIQUE ET NOUVEAUX PRECURSEURS POUR LA MISE EN OEUVRE DE CE PROCEDE

N° de brevet: EP1896629 (A1)
Date de publication: 2008-03-12
Inventeur(s): DUSSARRAT CHRISTIAN [JP];
Demandeur(s): AIR LIQUIDE [FR];
Classification: C23C16/32;C23C16/40;H01L21/316;H01L21/314;
N° de demande: EP20060778689 20060621 
Numéro(s) de priorité: WO2006FR01495 20060621;FR20050051675 20050621 
A scanner section (10), a printing section (20), and an operation section (30) having an input section for receiving operational information and a display section (32) are provided. A setting table section (40) is provided and is formed from non-contact type and contact type IC card reader use sections (42,41), in which the non-contact type and contact type IC card readers (52,51) are arranged, respectively. The non-contact type and contact type IC card reader use sections are closer to and farther from an operator, respectively. The non-contact type card reader section includes means for holding a non-contact type card.

Copyright © 2008 Patfr.com Tous droits réservés. Contact