PROCEDE DESTINE A PRODUIRE UN MONOCRISTAL DE CARBURE DE SILICIUM

N° de brevet: EP1895031 (A1)
Date de publication: 2008-03-05
Inventeur(s): SAKAMOTO HIDEMITSU [JP];
Demandeur(s): TOYOTA MOTOR CO LTD [JP];
Classification: C30B29/36;C30B17/00;
N° de demande: EP20060767203 20060616 
Numéro(s) de priorité: WO2006JP312553 20060616;JP20050179412 20050620 
A method for producing a silicon carbide single crystal, which comprises bringing a silicon carbide single crystal substrate into contact with a melt prepared by melting a raw material containing Si and C, and growing a silicon carbide single crystal on the substrate, the method including performing a cycle comprising the following steps (a) and (b): a) a step of bringing the seed crystal substrate into contact with the surface of the melt, growing a single crystal, and separating the seed crystal substrate from the surface of the melt thereby interrupting the growth of the single crystal, and b) a step of bringing the seed crystal substrate into contact with the surface of the melt and growing a single crystal, at least one time, wherein the seed crystal is a 6H-silicon carbide single crystal or a 15R-silicon carbide single crystal and the resulting single crystal is a 4H-silicon carbide single crystal.

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