PROCEDE DESTINE A PRODUIRE UN MONOCRISTAL DE CARBURE DE SILICIUM
| N° de brevet: |
EP1895031 (A1) |
| Date de publication: |
2008-03-05 |
| Inventeur(s): |
SAKAMOTO HIDEMITSU [JP]; |
| Demandeur(s): |
TOYOTA MOTOR CO LTD [JP]; |
| Classification: |
C30B29/36;C30B17/00; |
| N° de demande: |
EP20060767203 20060616 |
| Numéro(s) de priorité: |
WO2006JP312553 20060616;JP20050179412 20050620 |
A method for producing a silicon carbide single crystal, which comprises bringing a silicon carbide single crystal substrate into contact with a melt prepared by melting a raw material containing Si and C, and growing a silicon carbide single crystal on the substrate, the method including performing a cycle comprising the following steps (a) and (b): a) a step of bringing the seed crystal substrate into contact with the surface of the melt, growing a single crystal, and separating the seed crystal substrate from the surface of the melt thereby interrupting the growth of the single crystal, and b) a step of bringing the seed crystal substrate into contact with the surface of the melt and growing a single crystal, at least one time, wherein the seed crystal is a 6H-silicon carbide single crystal or a 15R-silicon carbide single crystal and the resulting single crystal is a 4H-silicon carbide single crystal.
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