DISPOSITIF POUR PRODUIRE UN MONOCRISTAL DE SEMI–CONDUCTEUR
| N° de brevet: |
EP1895028 (A1) |
| Date de publication: |
2008-03-05 |
| Inventeur(s): |
SUGIMURA WATARU [JP];HOURAI MASATAKA [JP];ONO TOSHIAKI [JP]; |
| Demandeur(s): |
SUMCO CORP [JP]; |
| Classification: |
C30B29/06;C30B15/20; |
| N° de demande: |
EP20050811659 20051202 |
| Numéro(s) de priorité: |
WO2005JP22194 20051202;JP20050180001 20050620 |
This apparatus for manufacturing a semiconductor single crystal includes: a crucible; a heater; a crucible driving unit; a chamber for housing the crucible and the heater; and a hydrogen mixed gas supplying device for supplying into the chamber a hydrogen mixed gas including an inert gas in admixture with a hydrogen-containing gas that contains hydrogen atoms, wherein the hydrogen mixed gas supplying device includes: a hydrogen-containing gas supply unit; an inert gas supply unit; a hydrogen-containing gas flow rate controller; an inert gas flow rate controller; and a gas mixing unit for uniformly mixing together the hydrogen-containing gas and the inert gas so as to form a hydrogen mixed gas.
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