DISPOSITIF POUR PRODUIRE UN MONOCRISTAL DE SEMI–CONDUCTEUR

N° de brevet: EP1895028 (A1)
Date de publication: 2008-03-05
Inventeur(s): SUGIMURA WATARU [JP];HOURAI MASATAKA [JP];ONO TOSHIAKI [JP];
Demandeur(s): SUMCO CORP [JP];
Classification: C30B29/06;C30B15/20;
N° de demande: EP20050811659 20051202 
Numéro(s) de priorité: WO2005JP22194 20051202;JP20050180001 20050620 
This apparatus for manufacturing a semiconductor single crystal includes: a crucible; a heater; a crucible driving unit; a chamber for housing the crucible and the heater; and a hydrogen mixed gas supplying device for supplying into the chamber a hydrogen mixed gas including an inert gas in admixture with a hydrogen-containing gas that contains hydrogen atoms, wherein the hydrogen mixed gas supplying device includes: a hydrogen-containing gas supply unit; an inert gas supply unit; a hydrogen-containing gas flow rate controller; an inert gas flow rate controller; and a gas mixing unit for uniformly mixing together the hydrogen-containing gas and the inert gas so as to form a hydrogen mixed gas.

Copyright © 2008 Patfr.com Tous droits réservés. Contact