PROCEDE DE CROISSANCE D'UN MONOCRISTAL DE SILICIUM ET MONOCRISTAL DE SILICIUM OBTENU PAR CE PROCEDE
| N° de brevet: |
EP1895026 (A1) |
| Date de publication: |
2008-03-05 |
| Inventeur(s): |
INAMI SHUICHI [JP];MURAKAMI HIROKI [JP];TAKASE NOBUMITSU [JP];HAMADA KEN [JP];NAKAMURA TSUYOSHI [JP]; |
| Demandeur(s): |
SUMCO CORP [JP]; |
| Classification: |
C30B15/20;C30B29/06; |
| N° de demande: |
EP20050782038 20050912 |
| Numéro(s) de priorité: |
WO2005JP16783 20050912;JP20050179996 20050620 |
This method for producing silicon single crystals includes: growing a silicon single crystal by the Czochralski method while cooling at least part of the silicon single crystal under growth with a cooling member which circumferentially surrounds the silicon single crystal and has an inner contour that is coaxial with a pull axis, wherein an ambient gas in which the silicon single crystal is grown includes a hydrogen-atom-containing substance in gaseous form. This silicon single crystal is produced by the above method.
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