PROCEDE DE CROISSANCE D'UN MONOCRISTAL DE SILICIUM ET MONOCRISTAL DE SILICIUM OBTENU PAR CE PROCEDE

N° de brevet: EP1895026 (A1)
Date de publication: 2008-03-05
Inventeur(s): INAMI SHUICHI [JP];MURAKAMI HIROKI [JP];TAKASE NOBUMITSU [JP];HAMADA KEN [JP];NAKAMURA TSUYOSHI [JP];
Demandeur(s): SUMCO CORP [JP];
Classification: C30B15/20;C30B29/06;
N° de demande: EP20050782038 20050912 
Numéro(s) de priorité: WO2005JP16783 20050912;JP20050179996 20050620 
This method for producing silicon single crystals includes: growing a silicon single crystal by the Czochralski method while cooling at least part of the silicon single crystal under growth with a cooling member which circumferentially surrounds the silicon single crystal and has an inner contour that is coaxial with a pull axis, wherein an ambient gas in which the silicon single crystal is grown includes a hydrogen-atom-containing substance in gaseous form. This silicon single crystal is produced by the above method.

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