Liquide électrolytique pour le polissage électrolytique et procédé de polissage électrolytique

N° de brevet: EP1894656 (A2)
Date de publication: 2008-03-05
Inventeur(s): KODERA AKIRA [JP];TOMA YASUSHI [JP];SUZUKI TSUKURU [JP];SAITO TAKAYUKI [JP];KOBATA ITSUKI [JP];
Demandeur(s): EBARA CORP [JP];
Classification: B23H5/08;B23H5/12;C25F7/00;C25F3/16;
N° de demande: EP20070017294 20070904 
Numéro(s) de priorité: JP20060239347 20060904;JP20070009849 20070119;JP20070173908 20070702 
An electrolytic liquid is used for electrolytic polishing which can provide a processed surface having high flattening characteristics with a low voltage applied while ensuring a higher processing rate for an conductive material, and can remove an unnecessary conductive material and expose a barrier film without causing dishing, erosion, or etching at the interface between the barrier film and a metal (conductive material) . The electrolytic liquid for use in electrolytic polishing of a surface conductive material of a workpiece comprises an aqueous solution containing at least one organic acid or its salt, at least one strong acid having a sulfonic acid group, a corrosion inhibitor and a water-soluble polymeric compound.

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