REGLAGE DE LA TEMPERATURE DU SUBSTRAT POUR LE DEPOT CHIMIQUE EN PHASE VAPEUR PAR COMBUSTION
| N° de brevet: |
EP1888810 (A2) |
| Date de publication: |
2008-02-20 |
| Inventeur(s): |
AMMERLAAN JOHANNES A M [NL];MAESSEN RALPH T H [NL]; |
| Demandeur(s): |
KONINKL PHILIPS ELECTRONICS NV [NL]; |
| Classification: |
C23C16/453; |
| N° de demande: |
EP20050826737 20051207 |
| Numéro(s) de priorité: |
WO2005IB54100 20051207;US20040635219P 20041210 |
The support (11) has components held on or in a base area (12) of the support, and circuit wires (18) fastened at connecting areas (19, 20) of the components in a self-supporting manner, where the circuit wires run through a free space (22) over the base area. The connecting areas are provided with clamping points (21) for mechanically fixing the connecting wires, which are not firmly welded. Spacer columns are formed at the base area. Independent claims are also included for the following: (1) a device for producing a component support (2) a method for manufacturing an electric component.
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