CIBLE DE PULVÉRISATION CATHODIQUE ET PROCÉDÉ DE FABRICATION IDOINE

N° de brevet: EP1887100 (A1)
Date de publication: 2008-02-13
Inventeur(s): NAKAMURA A [JP];YAHAGI M [JP];SATO K [JP];
Demandeur(s): NIPPON MINING CO [JP];
Classification: C04B35/453;C23C14/34;
N° de demande: EP20060729368 20060317 
Numéro(s) de priorité: WO2006JP305378 20060317;JP20050156646 20050530 
Provided is a sputtering target comprised of 0.2 to 3.0 at% of Al 2 O 3 , 1 to 27 at% of MgO and/or SiO 2 , and remnant ZnO, and having a low bulk resistance. Also provided is a manufacturing method of a sputtering target having a low refractive index and a low bulk resistance, comprising the steps of preliminarily mixing and preliminarily calcinating Al 2 O 3 powder and ZnO powder as the raw material, subsequently mixing MgO and/or SiO 2 powder to the calcinated Al 2 O 3 -ZnO mixed powder, and thereafter sintering the obtained. The target of the present invention for forming an optical thin film does not contain sulfur, has low bulk resistance and enables DC sputtering, and has a low refractive index. Since this target has a high transmission factor and is comprised of a non-sulfide system, it is useful in forming a thin film for an optical information recording medium in which the adjacent reflective layer and recording layer will not deteriorate easily. As a result, the present invention is able to improve the characteristics of the optical information recording medium, reduce the facility costs, and considerably improve the throughput by improving the deposition speed.

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