Méthode de fabrication d'une structure poreuse d'oxide d'aluminium auto–organisée, article nanoporeux, et nano–objet.

N° de brevet: EP1884578 (A1)
Date de publication: 2008-02-06
Inventeur(s): LEE WOO DR [DE];NIELSCH KORNELIUS DR [DE];GOESELE ULRICH PROF DR [DE];JI RAN [DE];
Demandeur(s): MPG MAX PLANCK GES ZUR FOERDER [DE];
Classification: C25D11/10;C25D11/12;C25D11/16;
N° de demande: EP20060015912 20060731 
Numéro(s) de priorité: EP20060015912 20060731 
A new oxalic acid based anodization process for long-range ordered alumina membranes has been developed, which can readily be implemented in nanotechnology as well as in industry. The process is a new generation of the so-called "hard anodization (HA)" that has widely been employed in industry for high-speed fabrication of mechanically robust, very thick (>100 µm) and low-porosity anodic alumina films since the 1960s. It offers big advantages over conventional anodization processes for nanoporous alumina membranes in terms of processing time, enabling 2500-3500% faster oxide growth with improved ordering of the nanopores. Perfectly ordered anodic alumina membranes on a cm 2 -scale with a high aspect ratio (>1000) of uniform nanopores with periodically modulated diameters have been realized by this new anodization process.

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