SYSTEME DE POMPE A VIDE

N° de brevet: EP1880111 (A1)
Date de publication: 2008-01-23
Inventeur(s): KALISCH DIRK [DE];STOLLE ROBERT [DE];ODENDAHL HEINZ-DIETER [DE];
Demandeur(s): OERLIKON LEYBOLD VACUUM GMBH [DE];
Classification: F04D19/04;F04D29/64;F04D29/66;
N° de demande: EP20060754953 20060502 
Numéro(s) de priorité: WO2006EP61977 20060502;DE200510020904 20050507 
A metallic copper and resin composite body manufacturing method of forming a copper wiring layer that forms an inner layer circuit, establishing an insulating layer with a resin on said wiring layer, forming via holes which expose the copper surface under the insulative layer, and depositing a metal on the copper surface that is exposed at the bottom of the via holes. The method includes a step of: removing copper oxide which forms on the surface of the copper that is exposed in the bottom of the via holes using a phosphoric acid aqueous solution with a pH between 1 and 3. The method suppresses haloing is and via holes with excellent solder bonding are formed.

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