DISPOSITIF DE BROYAGE
| N° de brevet: |
EP1879698 (A1) |
| Date de publication: |
2008-01-23 |
| Inventeur(s): |
REICHARDT ROLAND [DE];WIECHERT WOLFGANG [DE]; |
| Demandeur(s): |
UNIV SIEGEN [DE]; |
| Classification: |
B02C17/16;B02C17/22; |
| N° de demande: |
EP20060724452 20060420 |
| Numéro(s) de priorité: |
WO2006EP03617 20060420;DE200510018400 20050420 |
A metallic copper and resin composite body manufacturing method of forming a copper wiring layer that forms an inner layer circuit, establishing an insulating layer with a resin on said wiring layer, forming via holes which expose the copper surface under the insulative layer, and depositing a metal on the copper surface that is exposed at the bottom of the via holes. The method includes a step of: removing copper oxide which forms on the surface of the copper that is exposed in the bottom of the via holes using a phosphoric acid aqueous solution with a pH between 1 and 3. The method suppresses haloing is and via holes with excellent solder bonding are formed.
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