PROCÉDÉ DE FABRICATION D'UNE NANOSTRUCTURE ET NANOSTRUCTURE- Brevets EP1767491 (A1)

PROCÉDÉ DE FABRICATION D'UNE NANOSTRUCTURE ET NANOSTRUCTURE

N° de brevet:	EP1767491 (A1)
Date de publication:	2007-03-28
Inventeur(s):	FUJIKAWA SHIGENORI [JP];KUNITAKE TOYOKI [JP];HADA HIDEO [JP];OGATA TOSHIYUKI [JP];
Demandeur(s):	RIKEN [JP];
Classification:	B82B3/00;C01B33/12;H01L21/027;
N° de demande:	EP20050751208 20050608
Numéro(s) de priorité:	WO2005JP10899 20050608;JP20040169398 20040608

A method of forming a nano-structure can form a fine pattern easily, and the nano-structure obtained by the method is provided. A method of forming a nano-structure comprising forming a thin film by a liquid phase adsorption on surface of a template formed on a substrate, and removing a portion of the thin film, and removing the template is used.