DISPOSITIF ET PROCEDE DE CONFIGURATION DE STRUCTURES SUR UN SUBSTRAT

N° de brevet: EP1682445 (A1)
Date de publication: 2006-07-26
Inventeur(s): KARG SIEGFRIED F [CH];RIEL HEIKE E [CH];RIESS WALTER [CH];SCHLITTLER RETO [CH];GERMANN ROLAND W [CH];
Demandeur(s): IBM [US];
Classification: B82B3/00;C23C16/04;H01J37/317;
N° de demande: EP20040798835 20041109 
Numéro(s) de priorité: WO2004IB03696 20041109;EP20030405806 20031112;EP20040798835 20041109 
A barrier film which can effectively protect an organic EL device, an efficient method for producing the barrier film, and a light-emitting display exhibiting excellent durability in which a non-emission area such as the dark spot occurs to only a small extent are provided. A method for producing a barrier film for light-emitting displays including a glass material containing three or more components, the barrier film being formed by a vapor deposition method. A light-emitting display including a supporting substrate 1, an emitting layer 2, and the barrier film 3 produced by the method. The barrier film can be produced with a target containing 50 to 90 wt% of silicon oxide, 5 to 20 wt% of boron oxide and 1 to 10 wt% of aluminum oxide by sputtering method.

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