STRUCTURE DE TROUS ET PROCEDURE DE FABRICATION

N° de brevet: EP1199382 (A1)
Date de publication: 2002-04-24
Inventeur(s): IKEDA TOMOO [JP];
Demandeur(s): CITIZEN WATCH CO LTD [JP];
Classification: B41J2/14;B41J2/16;C25D1/08;D01D4/02;
N° de demande: EP20010917489 20010322 
Numéro(s) de priorité: WO2001JP02305 20010322;JP20000079829 20000322;JP20010037875 20010215 
The invention provides a hole structure through which is formed a deep through-hole having microscopic open ends, and also provides a method of fabricating the same. The hole structure of the invention contains a through-hole having a first open end and a second open end larger in size than the first open end, wherein the size, d, of the second open end is not smaller than 2 mu m and not larger than 50 mu m, and the through-hole has a depth t larger than d but not larger than 15d. The fabrication method of the invention comprises the steps of: forming an electrically conductive opaque layer in a prescribed pattern over a transparent substrate; forming a layer of insoluble photosensitive material on one side of the transparent substrate where the electrically conductive opaque layer is formed; applying exposure to the insoluble photosensitive material layer from the other side of the transparent substrate where the electrically conductive opaque layer is not formed; developing the insoluble photosensitive material and thereby forming a resist that matches the prescribed pattern; and forming the hole structure by electroplating on the one side where the resist has been formed. <IMAGE>

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