DISPOSITIF DE POSITIONNEMENT A CADRE DE REFERENCE POUR SYSTEME DE MESURE- Brevets EP0772801 (A1)

DISPOSITIF DE POSITIONNEMENT A CADRE DE REFERENCE POUR SYSTEME DE MESURE

N° de brevet:	EP0772801 (A1)
Date de publication:	1997-05-14
Inventeur(s):	VAN ENGELEN GERARD [NL];SPERLING FRANK BERNHARD [NL];JANSSEN HENRICUS WILHELMUS ALO [NL];BOUWER ADIANUS GERARDUS [NL];VAN DIJK CORNELIS DIONYSIUS [NL];VAN KIMMENADE JOHANNES MATHIJS [NL];VAN EIJK JAN [NL];VAN DER PAL ADRIANUS [NL];
Demandeur(s):	PHILIPS ELECTRONICS NV [NL];ASM LITHOGRAPHY BV [NL];
Classification:	G03F7/20;G03F9/00;
N° de demande:	EP19960909310 19960429
Numéro(s) de priorité:	EP19960909310 19960429;EP19950201409 19950530;EP19960200575 19960304;WO1996IB00383 19960429

The positioning appts. includes an substrate table (1), a subsystem for processing an object on the table, a drive unit (21) displacing the table, and a system (39) measuring the position of table w.r.t. the subsystem. The drive unit has a stationary part fastened to the positioning appts. machine frame co-operating with the measuring system's stationary and movable parts fastened to the table. The measuring system stationary part is fastened to the positioning appts. reference frame dynamically isolated from the machine frame.